团队成员对PMUTs的单元以及阵列设计理论进行了研究，构建了其机-电-声三场耦合理论模型，相对于传统的有限元仿真设计方法极大提高了设计优化效率。并通过COMSOL仿真以及实验结果验证了该理论模型。目前基于该模型，PMUT的理论系统已基本完成，适用于目前MEMS工艺所能实现的所有PMUT单元以及阵列的设计。

发表论文：

[1]  Tingzhong Xu, Libo Zhao*, Zhuangde Jiang, et al. Array design of piezoelectric micromachined ultrasonic transducers with low crosstalk and high emission performance [J], IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 67(4): 789-800, 2019.

[2]  Tingzhong Xu, Libo Zhao*, Zhuangde Jiang , et al. An analytical equivalent circuit model for optimization design of a broadband piezoelectric micromachined ultrasonic transducer with an annular diaphragm [J], IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 66(11): 1760-1776, 2019.