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- 1. 微纳制造及智能传感
针对微纳结构多材料表/界面调控的关键难题，提出了微纳尺度域内多材料表/界面的结构场调控成型与驱动理论模型，发现了多材料体相结构的调控机制，提出了多材料表/界面设计与精确调控的理论模型，发展了多材料表/界面结构的纳米精度制造与微域调控方法，突破了微域光信息的精确操控难题。
图1 多材料表/界面结构的纳米精度外场调控制造原理与方法
- 2. 光电子器件的跨尺度制造及应用
针对大幅面微纳米结构一致性制造的难题，发展了外场调控的连续滚压印制造技术，实现了幅面为700×800 mm2，特征结构尺寸<500nm周期的二维光栅、直径650 mm的圆光栅及ϕ500mm的“超精密圆光栅角度传感器”的高精度制造。开发的在非平面结构化光阑，保证了异形面上微结构图形的一致性，解决了航天用红外探测器视场不规则、一致性较差的难题，推广应用于国防工业的高精密测量系统或装置中。
图2 大幅面二维光栅的跨尺度制造及应用
- 3. 超精密测量
提出了弱干涉信号的位姿解析理论模型，发展了时空域光栅纳米级细分新技术，实现了光栅信号的实时全参量闭环补偿和多自由度读数系统，测量分辨率达到0.25 nm。技术上不仅突破了国外技术封锁、产品禁运的卡脖子局面，自制知识产权的核心技术在国际行业内上形成了互补性。
图3 二维光栅弱干涉信号的读数技术与读数系统
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1. 标题: Nanograss-structured counter electrode for dye-sensitized solar cells
作者: Jiang, Wei; Yin, Lei; Liu, Hongzhong; 等.
来源出版物: JOURNAL OF POWER SOURCE
出版年: NOV 15 2012
2. 标题: Fabrication of micro-structures on a PVDF/TiO2 nano-composite film using photocatalytic lithography
作者: An, Ningli; Liu, Hongzhong; Ding, Yucheng; 等.
来源出版物: APPLIED SURFACE SCIENCE
出版年: APR 1 2012
3. 标题: Effect of patterned and aligned carbon nanotubes on field emission properties
作者: Liu, Hongzhong; Shi, Yongsheng; Chen, Bangdao; 等.
会议: 18th International Vacuum Congress (IVC)/International Conference on Nanoscience and Technology (ICNT)/14th International Conference on Surfaces Science (ICSS)/Vacuum and Surface Sciences Conference of Asia and Australia (VASSCAA) 会议地点: Beijing, PEOPLES R CHINA 会议日期: AUG 23-27, 2010
来源出版物: VACUUM 出版年: FEB 8 2012
4. 标题: Monolithic design of a compliant template orientation stage for step imprint lithography
作者: Shao, J-Y; Ding, Y-C; Liu, H-Z; 等.
来源出版物: PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART B-JOURNAL OF ENGINEERING MANUFACTURE
出版年: FEB 2012
5. 标题: Selective-Filling Mold for Residual-Layer-Free Patterning of 3D Microstructures
作者: Jiang, Weitao; Liu, Hongzhong; Ding, Yucheng
来源出版物: MATERIALS AND MANUFACTURING PROCESSES
出版年: 2012
6. 标题: Fabrication of a graphene field effect transistor array on microchannels for ethanol sensing
作者: Chen, Bangdao; Liu, Hongzhong; Li, Xin; 等.
来源出版物: APPLIED SURFACE SCIENCE
出版年: JAN 1 2012
作者: Liu, Hongzhong; Ma, Hui; Zhou, Weiman; 等.
来源出版物: APPLIED SURFACE SCIENCE
出版年: JAN 1 2012
8. 标题: A metal/insulator/metal field-emission cannon
作者: Liu, Hongzhong; Chen, Bangdao; Li, Xin; 等.
来源出版物: NANOTECHNOLOGY
出版年: NOV 11 2011
9. 标题: Thermal shock induced nanocrack as high efficiency surface conduction electron emitter
作者: Chen, Bangdao; Liu, Hongzhong; Wang, Hongtao; 等.
来源出版物: APPLIED SURFACE SCIENCE
出版年: AUG 15 2011
作者: Shao, J-Y; Liu, H-Z; Ding, Y-C; 等.
来源出版物: PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART B-JOURNAL OF ENGINEERING MANUFACTURE
出版年: APR 2011
11. 标题: Preparation and electroactive properties of a PVDF/nano-TiO(2) composite film
作者: An Ningli; Liu Hongzhong; Ding Yucheng; 等.
来源出版物: APPLIED SURFACE SCIENCE
出版年: FEB 2011
12. 标题: Making modified fluoropolymer molds for ultraviolet nanoimprint lithography作者: Ye Xiangdong; Ding Yucheng; Liu Hongzhong; 等.
来源出版物: THIN SOLID FILMS
出版年: SEP 2010
13. 标题: Making modified fluoropolymer films with low surface energy
作者: Ye Xiangdong; Duan Yugang; Ding Yucheng; Liu Hongzhong;等.
来源出版物: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
出版年: JUL 2010
14. 标题: Roller-reversal imprint process for preparation of large-area microstructures
作者: Liu Hongzhong; Jiang Weitao; Ding Yucheng; 等.
来源出版物: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
出版年: JAN 2010
15. 标题: Room-temperature capillary-imprint lithography for making micro-nanostructures in large areas作者: Ye Xiangdong; Ding Yucheng; Duan Yugang; Liu Hongzhong;等.
来源出版物: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
出版年: JAN 2010
16. 标题: Making high-fidelity imprint template by resist patterns over a flexible conductive polymer substrate作者: Ye Xiangdong; Ding Yucheng; Duan Yugang; Liu Hongzhong;等.
来源出版物: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
出版年: JAN 2010
17. 标题: Investigation of pattern coating on mould roller in roller-reversal imprint process
作者: Jiang Weitao; Liu Hongzhong; Ding Yucheng; 等.
来源出版物: MICROELECTRONIC ENGINEERING
出版年: DEC 2009
18. 标题: Investigation of growth properties of patterned and aligned carbon nanotubes for field emitter作者: Liu Hongzhong; Shi Yongsheng; Ding Yucheng; 等.
来源出版物: MICROELECTRONIC ENGINEERING
出版年: NOV 2009
19. 标题: Effects of exposure time on defects and demolding force in soft ultraviolet nanoimprint lithography作者: Ye Xiangdong; Ding Yucheng; Duan Yugang; Liu Hongzhong;等.
来源出版物: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
出版年: SEP 2009
20. 标题: Growth of patterned and aligned carbon nanotube bundles on micro-structured substrate
作者: Shi Yongsheng; Ding Yucheng; Liu Hongzhong; 等.
来源出版物: APPLIED SURFACE SCIENCE
出版年: JUN 15 2009
21. 标题: Fabrication of bio-microelectrodes for deep-brain stimulation using microfabrication and electroplating process
作者: Qin Ge; Liu Yaxiong; Liu Hongzhong; 等.
来源出版物: MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
出版年: JUN 2009
22. 标题: Novel imprint lithography process used in fabrication of micro/nanostructures in organic photovoltaic devices作者: Liu Hongzhong; Ding Yucheng; Jiang Weitao; 等.
会议名称: 4th Asia-Pacific Conference on Transducers and Micro-Nano Technologies
会议地点: Tainan, TAIWAN 会议日期: JUN , 2008
来源出版物: JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS
出版年: APR-JUN 2009
23. 标题: Research on the cast molding process for high quality PDMS molds
作者: Ye Xiangdong; Liu Hongzhong; Ding Yucheng; 等.
来源出版物: MICROELECTRONIC ENGINEERING
出版年: MAR 2009
24. 标题: Fabrication of carbon nanotube arrays for field emission and sensor devices by nanoimprint lithography
作者: Yin Lei; Liu Hongzhong; Ding Yucheng; 等.
会议名称: Workshop on Recent Advances on Low Dimensional Structures and Devices
会议地点: Univ Nottingham, Nottingham, ENGLAND 会议日期: APR 07-09, 2008
来源出版物: MICROELECTRONICS JOURNAL
出版年: MAR 2009
25. 标题: Mold deformation in soft UV-nanoimprint lithography
作者: Lan HongBo; Ding YuCheng; Liu HongZhong; 等.
来源出版物: SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES
出版年: FEB 2009
26. 标题: Matrix induced synthesis of Y(3)Al(5)O(12):Ce phosphor through the Pechini method
作者: Zhang Kai; Hu Wenbin; Li Jun; Liu Hongzhong;等.
来源出版物: INTERNATIONAL JOURNAL OF MATERIALS RESEARCH
出版年: FEB 2009
27. 标题: A novel loading and demoulding process control in UV nanoimprint lithography
作者: Liu Hongzhong; Jiang Weitao; Ding Yucheng; 等.
来源出版物: MICROELECTRONIC ENGINEERING
出版年: JAN 2009
28. 标题: Strategy for a loading force induced overlay position shift in step imprint lithography
作者: Shao J. Y.; Ding Y. C.; Liu H. Z.; 等.
来源出版物: PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART B-JOURNAL OF ENGINEERING MANUFACTURE
出版年: JAN 2009
29. 标题: Investigation of ink transfer in a roller-reversal imprint process
作者: Jiang Weitao; Liu Hongzhong; Ding Yucheng; 等.
来源出版物: JOURNAL OF MICROMECHANICS AND MICROENGINEERING
出版年: JAN 2009
30. 标题: PtIr Microwire Bonding for Deep-Brain Microelectrode by Electroplating
作者: Qin Ge; Ding Yucheng; Liu Yaxiong; Liu Hongzhong;等.
来源出版物: SENSORS AND MATERIALS
出版年: 2009
31. 标题: Alignment measurement method for imprint lithography using moire fringe pattern
作者: Shao Jinyou; Liu Hongzhong; Ding Yucheng; 等.
来源出版物: OPTICAL ENGINEERING
出版年: NOV 2008
32. 标题: A novel overlay process for imprint lithography using load release and alignment error pre-compensation method
作者: Shao Jinyou; Ding Yucheng; Tang Yiping; Liu Hongzhong;等.
会议名称: IEEE International Symposium on Advanced Gate Stack Technology (ISAGST) 会议地点: Austin, TX 会议日期: 2006
来源出版物: MICROELECTRONIC ENGINEERING
出版年: JAN 2008
33.标题: Fabrication and characterization of nanostructural vanadium pentoxide hollow microspheres
作者: Zhu Ding; Liu Heng; Yao Ya-Dong; Liu Hongzhong;等.
来源出版物: JOURNAL OF INORGANIC MATERIALS
出版年: JAN 2008
34. 标题: Optimal Geometry and Stimulating Mechanism of Deep-brain Electrode - Role of Electrode Contact Geometry
作者: Lian Qin; Wang Jue; Liu Hongzhong; 等.
编者: Simos TE; Psihoyios G; Tsitouras C
会议名称: International Conference on Numerical Analysis and Applied Mathematics 会议地点: Psalidi, GREECE 会议日期: SEP 16-20, 2008
来源出版物: NUMERICAL ANALYSIS AND APPLIED MATHEMATICS 丛书: AIP CONFERENCE PROCEEDINGS
出版年: 2008
35. 标题: Development of a step micro-imprint lithography tool
作者: Lan Hongbo; Ding Yucheng; Liu Hongzhong; 等.
来源出版物: JOURNAL OF MICROMECHANICS AND MICROENGINEERING
出版年: OCT 2007
36. 标题: Review of the wafer stage for nanoimprint lithography
作者: Lan Hongbo; Ding Yucheng; Liu Hongzhong; 等.
来源出版物: MICROELECTRONIC ENGINEERING
出版年: APR 2007
37. 标题: Distortion reduction by load release for imprint lithography
作者: Li HS; Ding YC; Tang YP; Liu HZ;等.
来源出版物: MICROELECTRONIC ENGINEERING
出版年: MAR 2006
38. 标题: Novel nano-scale overlay alignment method for room-temperature imprint lithography - art. no. 61491V
作者: Wang L; Ding YC; Lu BH; Liu HZ;等.
编者: Yang L; Wen S; Chen Y; 等.
会议名称: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies 会议地点: Xian, PEOPLES R CHINA 会议日期: NOV 02-05, 2005
来源出版物: 2nd International Conference on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies 丛书: PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)
出版年: 2006
39. 标题: UV curing imprint lithography for micro-structure in MEMS manufacturing
作者: Ding Yucheng; Liu Hongzhong; Lu Bingheng; 等.
书籍作者: Tay, FEH; Jianmin, M; Bergstrom, J; 等.
会议名称: International MEMS Conference 2006 会议地点: Singapore, SINGAPORE 会议日期: MAY 09-12, 2006
来源出版物: INTERNATIONAL MEMS CONFERENCE 2006 丛书: Journal of Physics Conference Series
出版年: 2006
40. 标题: A measurement system for step imprint lithography
作者: Liu HZ; Lu BH; Ding YC; 等.
来源出版物: MEASUREMENT TECHNOLOGY AND INTELLIGENT INSTRUMENTS VI
出版年: 2005
41. 标题: A motor-piezo actuator for nano-scale positioning based on dual servo loop and nonlinearity compensation
作者: Liu HZ; Lu BH; Ding YC; 等.
来源出版物: JOURNAL OF MICROMECHANICS AND MICROENGINEERING
出版年: MAR 2003