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一种同质多层金属薄膜材料的制备方法,ZL 2009 1 0219553.5,Invent,2012-7-1,
具有晶粒尺寸差异的Cu/Ta纳米多层膜的制备方法,ZL200910219558.8,Invent,2012-1-1,
一种测试金属薄膜室温压入蠕变性能的方法,ZL200510124587.8,Invent,2009-1-1,
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