具有晶粒尺寸差异的Cu/Ta纳米多层膜的制备方法
- Release Time:2025-04-30
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Title:
具有晶粒尺寸差异的Cu/Ta纳米多层膜的制备方法Type of Patent:
InventApplication Number:
ZL200910219558.8Service Invention or Not:
NoApplication Date:
2012-01-01Date:
2025-04-30
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