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MEMS and Sensors
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Lecture
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Date
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Content
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1
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2013-02-25
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Introduction to MEMS & Sensors
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2
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2013-02-27
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Scaling Law
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3
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2013-03-04
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Design and Modelling
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4
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2013-03-06
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MEMS Materials
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5
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2013-03-11
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Microfabrication Techniques
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6
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2013-03-13
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Nanofabrication Techniques
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7
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2013-03-18
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Characterization Techniques - Part I
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8
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2013-03-20
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Characterization Techniques -Part II
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9
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2013-03-25
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Project I on Design and Modeling of MEMS – Comsol Case Study
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10
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2013-03-27
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11
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2013-04-01
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Sensor Characteristics
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12
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2013-04-03
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Physical principles of sensing
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13
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2013-04-08
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Interface Electronic Circuits
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14
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2013-04-10
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Pressure and Strain Sensors
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15
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2013-04-15
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Inertial Sensors
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16
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2013-04-17
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Optical MEMS and Sensors
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17
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2013-04-22
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Flow and Gas sensors
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18
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2013-04-24
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Microfluidics and Biosensors
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19
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2013-04-29
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Project II on Lab Experiment of Microfluidic Chips for Bio-analysis
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20
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2013-05-01
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