Programmable synchronization enhanced MEMS accelerometer work is online now
- 发布时间:
- 2020-07-27
- 文章标题:
- Programmable synchronization enhanced MEMS accelerometer work is online now
- 内容:
https://www.nature.com/articles/s41378-020-0170-2
Sensors: exploiting synchronization in developing high-resolution accelerometers
Researchers in China have first time exploited the natural phenomenon of synchronization into practical sensor design, which significantly enhanced the resolution of microelectromechanical systems (MEMS) accelerometers. A team led by X.W. and Z.J. at Xi’an Jiaotong University achieved synchronization of the sensing oscillator in the accelerometer and an external reading oscillator through the injection locking. The synchronization leads to a fivefold boost in the resolution of the accelerometer. The team also developed a frequency-tracking system to break through the limitation of the synchronization range thereby enabling the device to work in a wider dynamic range. In addition to the direct application in accelerometers, the technique can also be used to improve the performance of other MEMS resonant sensors.
近期,西安交通大学蒋庄德院士团队韦学勇教授课题组提出了一种基于可编程同步敏感增强机理的MEMS加速度传感系统,利用谐振器中的同步现象,实现了加速度传感器的敏感元件与外部读取元件的同步振荡,并在实验中观察到了零偏稳定性的五倍提升,理论分辨率为1.91μg。同时,加速度传感器的噪底也由同步状态前的5.31μg/rt-Hz降低至同步时的1μg/rt-Hz。为了解决传统同步振荡器面临的同步带宽过小、容易失锁的问题,团队设计了一种可编程频率自跟随调节系统,在系统失锁时利用压阻热效应调节外部读取元件的本征频率,从而将同步区间由113Hz提升至1246Hz,以保证加速度传感器在±1g内的全量程精确测量。该技术不仅为提升谐振式加速度传感器的分辨率和噪声等性能提供了新的思路,而且还可应用于其他MEMS谐振式传感器。




