基于微机电系统技术的粘度传感器芯片及其制备方法
Release Time:2025-04-30
Hits:
- Title:
- 基于微机电系统技术的粘度传感器芯片及其制备方法
- Disigner of the Invention:
- 赵立波
- Type of Patent:
- Invent
- Application Number:
- 授权号：ZL 2009 1 021936
- Service Invention or Not:
- No
- Application Date:
- 2009-02-01
- Date:
- 2025-04-30
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