Surface stress-induced deflection of a microcantilever with various widths and overall microcantilever sensitivity enhancement via geometry modification
Release Time:2025-04-30
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- Date:
- 2025-04-30
- Title of Paper:
- Surface stress-induced deflection of a microcantilever with various widths and overall microcantilever sensitivity enhancement via geometry modification
- Journal:
- Journal of Physics D: Applied Physics
- Summary:
- (SCI: 842IF, EI: 20114414481155) IF: 2.544(2011)
- Co-author:
- Guiming Zhang, Libo Zhao*, Zhuangde Jiang, et al
- Volume:
- 44(42)
- Page Number:
- 425402(11pp)
- Translation or Not:
- No
- Date of Publication:
- 2011-10-10




