耐高温压阻力敏硅芯片及静电键合工艺
Release Time:2025-04-30
Hits:
- Date:
- 2025-04-30
- Title of Paper:
- 耐高温压阻力敏硅芯片及静电键合工艺
- Journal:
- 北京理工大学学报
- Summary:
- (EI: 20114814563195)
- Co-author:
- 赵立波,赵玉龙,热合曼•艾比布力等
- Volume:
- 31(10)
- Page Number:
- 1162-1167
- Translation or Not:
- No
- Date of Publication:
- 2011-10-12




