Data-based switching feedforward control for repeating and varying tasks: With application to an ultraprecision wafer stage
发布时间:2025-04-30
点击次数:
- 发布时间:
- 2025-04-30
- 论文名称:
- Data-based switching feedforward control for repeating and varying tasks: With application to an ultraprecision wafer stage
- 发表刊物:
- IEEE Transactions on Industrial Electronics
- 合写作者:
- Min Li, Yu Zhu, Kaiming Yang, Laihao Yang, Chuxiong Hu
- 是否译文:
- 否
- 发表时间:
- 2018-12-20




