Nanomainpulator/纳米操纵手: Germany Kleindick (one set)

Thermal evaporator/热蒸镀仪: GSL-1800X-ZF4

 Ultrasonic Cleaner/超声波清洗机

Chemical hood/通风橱 3 sets

Spin coater/匀胶机：WS-650(No 1)，Chinese（No 2)

Deionized Water/超净水仪：Kertone-LAB MINI8-UVF

Plasma #1/等离子仪1: Germany HARRICK (Three grades power) 

Plasma #2/等离子仪2: 沈阳科晶(Current adjustable 电流连续可调)

Optical Mircoscope: LV150 (Long work distance 超长工作距离)

Ultrasonic Golden Wire Ball Welding Machine/超声波金丝球焊机: 伟天星WT2330

 Photolithography/光刻: UV Lamp Exposure/紫外灯曝光(365nm, Spectronics FC-100)

Mirco Transfer Station/微米转移台：2 sets(Alignment:1um, 4d, DIY)

Vacuum Dry Oven/真空干燥箱：2 Sets (Shanghai Yiheng, BPZ-6063LZ)