Single crystal monolayer MoS2 triangles with wafer-scale spatial uniformity by MoO3 pre-deposited chemical vapor deposition
发布时间：2025-04-30
点击次数：
- 发布时间：
- 2025-04-30
- 论文名称：
- Single crystal monolayer MoS2 triangles with wafer-scale spatial uniformity by MoO3 pre-deposited chemical vapor deposition
- 发表刊物：
- J. Crystal Growth
- 摘要：
- http://www.sciencedirect.com/science/article/pii/S0022024817305833
Highlights
•
MoO3 pre-deposition assisted CVD method for wafer-scale growth of MoS2 is proposed.
•
Single crystal monolayer samples are achieved with spatial and structure uniformity.
•
Good electrical properties of MoS2 can be observed.
- 合写作者：
- Z. F. Cheng, M. G. Xia*, R. X. Hu, C. P. Liang, S. L. Zhang
- 卷号：
- 480
- 页面范围：
- 6-12
- 是否译文：
- 否
- 发表时间：
- 2017-12-15