一种硅微加速度传感器芯片
Release Time:2025-04-30
Hits:
- Title:
- 一种硅微加速度传感器芯片
- Disigner of the Invention:
- 赵玉龙,刘岩,田边
- Type of Patent:
- Invent
- Application Number:
- 200910219464.0
- Service Invention or Not:
- No
- Application Date:
- 2010-06-01
- Date:
- 2025-04-30
- Prev One:梁膜结合微压传感器