Date:

2025-04-30

Title of Paper:

Effect of film deposition rate on the thermoelectric output of tungsten-rhenium thin film thermocouples by DC magnetron sputtering [J].

Journal:

Journal of Micromechanics and Microengineering

Co-author:

Tian B, Liu Z, Zhang Z, et al.

Volume:

30(6)

Translation or Not:

No

Date of Publication:

2020-07-23