A piezo-driven micro-inclination stage for calibration of a micro-acceleration transducer: structure and control strategy
- 发布时间:2025-04-30
- 论文名称:A piezo-driven micro-inclination stage for calibration of a micro-acceleration transducer: structure and control strategy
- 发表刊物:Measurement Science and Technology
- 摘要:micro-inclination stage for calibration
- 合写作者:Shao SB, Song SY, Xu ML, Xie SL,Li L
- 卷号:27
- 页面范围:025008
- 是否译文:否
- 发表时间:2016-05-01
- 合写作者:Shao SB, Song SY, Xu ML, Xie SL,Li L