Papers
Release Time: 2025-04-30Hits:
- Date:2025-04-30
- Title of Paper:On stress singularity at the interface edge between piezo-electric thin film and elastic substrate
- Journal:Microsystem Technologies
- Summary:Abstract This paper deals with the modeling aspects of the stress singularity at the interface edges between
piezoelectric thin film and elastic substrate. The electroelastic problem of a transversely isotropic piezoelectric
thin film attached to an elastic substrate is treated theoretically. Emphasis is placed on the investigation of the
singularity in the stress field at the free edge of interface. The eigen-equation determining the order of the singularity is derived. Numerical results for two edge geometries are presented for PZT film/silicon substrate
combinations. It is shown that the orders of the stress singularities range from 0.1 to 0.3 for the considered
cases. Moreover, piezoelectric effects may alter the singularity order to some extent, but not significantly. - Co-author:F Shang, T Kitamura
- Volume:11(8-10),
- Page Number:1115-1120
- Translation or Not:No
- Date of Publication:2005-09-30
