《Materials Science of Thin Films》,graduate course, Fall semester,teaching in English

This course focuses on tetrahedron relationships of processing-structure-properties-performance in metals, semiconductors, ceramics and other compound thin film materials. The course covers: 

Structure, bonding and properties of bulk solids; thermodynamics and kinetics of atomic motion in materials. Physical and chemical vapor deposition of thin film materials. Ion-surface interactions and plasma/ion beam processing of thin films. Nucleation and grain structure development of single crystal, polycrystalline and amorphous films. Epitaxy of compound semiconductor thin films for optoelectronic and information storage devices. Characterization techniques of thin films and surfaces.