集成化三维微力传感器研究
Release Time:2025-04-30
Hits:
- Project Name:
- 集成化三维微力传感器研究
- Status:
- 进行中
- Classification of Project:
- Vertical project
- Project Source:
- "863" High-tech Project
- Project Number:
- 2007AA04Z325
- Date of Project Approval:
- 2008-01-01
- Date:
- 2025-04-30
- Prev One:SOI高量程耐高温压力传感器




