SOI(梁膜结合)耐高温压力传感器 (排名第三)
Release Time:2025-04-30
Hits:
- Date:
- 2025-04-30
- Title of Award:
- SOI(梁膜结合)耐高温压力传感器 (排名第三)
- Granted by:
- 机械学院
- Grade of Award:
- First prize
- Type of Award:
- Bureau and Department Level Scientific and Technological Achievements Award
- Date of Award:
- 2004-01-01
- Co-author:
- 蒋庄德、赵玉龙、赵立波
- Prev One:耐高温压力传感器设计、制备技术及系列产品开发 (排名第三)
- Next One:棉条检测硅微传感器的研制及其应用 (排名第三)




