科研成果/Publication
期刊论文
- Li B, Zhao Y*, Li C, et al. A Differential Resonant Accelerometer with Low Cross-Interference and Temperature Drift:[J]. Sensors, 2017, 17(1):178，
- Li, B, Li, C, Zhao, Y* et al. Deep Reactive Ion Etching of Z-Cut Alpha Quartz for MEMS Resonant Devices Fabrication. Micromachines, 2020, 11(8), 724.
- Bo Li, Yulong Zhao*, Xin Ma, Cun Li, et al. Design of a Resonant Accelerometer Integrated with a Diamond Like Carbon Film Temperature Sensor[C]. 2017 IEEE SENSORS
- Bo Li, Cun Li, Yulong Zhao, Y* et al. An Integrated Packaged Resonant Accelerometer with Temperature Compensation [J].Review of Scientific Instruments
- Hong Xue; Zichao Zhang; Jiabin Ai; Cun Li; Bo Li*; Yulong Zhao; Aihua Wang ; Dynamic process of wet etching using BOE solutions to control the etch rate, roughness, and surface morphology of a Z-cut α-quartz wafer , Ceramics International, 2024, 50(14): 25978 25987
- Li Cun, Zhao Yulong*, Li Bo, Cheng Rongjun, Sun Dengqiang, et al. A micro-machined differential resonance accelerometer based on silicon on quartz method [J]. Sensors and Actuators A: Physical, 2017, 253: 1-9.
