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中文
Home
Research
Research Field
Papers
Patents
Publications
Projects
Teaching
Teaching Resources
Teaching Information
Teaching Achievement
Awards and Honours
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Projects
IC制造中压印光刻工艺与设备的研究开发
Release Time:2025-04-30
Hits:
Project Name:
IC制造中压印光刻工艺与设备的研究开发
Status:
进行中
Classification of Project:
Vertical project
Project Source:
"863" High-tech Project
Project Number:
2002AA420050
Date of Project Approval:
2003-01-01
Date of Project Completion:
2005-01-01
Subsidy Amount(Wan Yuan):
400.0
Date:
2025-04-30
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压印光刻工艺中微尺度流道动力学研究
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新型三维结构刻蚀技术
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