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中文
Home
Research
Research Field
Papers
Patents
Publications
Projects
Teaching
Teaching Resources
Teaching Information
Teaching Achievement
Awards and Honours
Enrollment Information
Student Information
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Blog
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刘红忠
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Projects
压印光刻工艺中微尺度流道动力学研究
Release Time:2025-04-30
Hits:
Project Name:
压印光刻工艺中微尺度流道动力学研究
Status:
进行中
Classification of Project:
Vertical project
Project Source:
Postdoctoral Foundation Project
Project Number:
2005037242
Date of Project Approval:
2004-01-01
Date of Project Completion:
2006-01-01
Subsidy Amount(Wan Yuan):
2.0
Date:
2025-04-30
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微位移阵列式传感器技术开发研究
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IC制造中压印光刻工艺与设备的研究开发
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