Electron Emission Properties of Silicon-Rich Silicon Oxide Film Prepared by Reactive Magnetron Sputtering Deposition and Rapid Thermal Annealing
Release Time:2025-04-30
Hits:
- Date:
- 2025-04-30
- Title of Paper:
- Electron Emission Properties of Silicon-Rich Silicon Oxide Film Prepared by Reactive Magnetron Sputtering Deposition and Rapid Thermal Annealing
- Journal:
- Materials Research
- Summary:
- aa
- Co-author:
- Yan Pang, Wei Zhao,Jie Li,Yuan Yuan,Wenbo Hu*,Shengli Wu,Yongdong Li
- Volume:
- 23(1)
- Page Number:
- e20190401
- Translation or Not:
- No
- Date of Publication:
- 2020-04-22