Investigation on the bonding quality of GaN and Si wafers bonded with Mo/Au nano-layer in atmospheric air
Release Time:2025-04-30
Hits:
- Date:
- 2025-04-30
- Title of Paper:
- Investigation on the bonding quality of GaN and Si wafers bonded with Mo/Au nano-layer in atmospheric air
- Journal:
- Materials Science in Semiconductor Processing
- Summary:
- a
- Co-author:
- Kang Wang, Kun Ruan, Haiyang Bai, Wenbo Hu*, Shengli Wu, Hongxing Wang
- Volume:
- 114
- Page Number:
- 105069
- Translation or Not:
- No
- Date of Publication:
- 2020-04-01