Laser Micro/Nano Precision Machining and Applications

Focusing on the critical demands for high precision, minimal damage, and cross-scale manufacturing in high-end manufacturing sectors, this research area investigates laser micro/nano machining technologies. It systematically explores processing methods such as femtosecond/picosecond laser surface structuring, micro-drilling, precision cutting, and selective etching, aiming to elucidate the intrinsic correlations between process parameters and machining quality (precision, roughness, heat-affected zone, recast layer). Customizable laser micro/nano processing solutions are developed for key application scenarios, including critical aerospace components (e.g., turbine film cooling holes, ceramic matrix composite machining), precision optical elements (e.g., diffractive optical elements, microlens arrays), and biomedical devices (e.g., vascular stents, drug release structures).