Date:

2025-04-30

Title of Paper:

Argon metastable state densities in inductively coupled plasma in mixtures of Ar and O2

Journal:

Journal of Physics D: Applied Physics

Summary:

SCI included

Co-author:

Hayashi Y, Hirao S, Zhang Y, et al

Volume:

2009, 42(14)

Page Number:

145 - 206

Translation or Not:

No

Date of Publication:

2009-04-16