Photothermal Vibration Spectra of Square Diaphragm with Boss for Low-Pressure Sensor
Release Time:2025-04-30
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- Date:
- 2025-04-30
- Title of Paper:
- Photothermal Vibration Spectra of Square Diaphragm with Boss for Low-Pressure Sensor
- Journal:
- PROC. 26th INTERNATIONAL CONFERENCE ON MICROELECTRONICS
- Co-author:
- D. M. Todoroviü , B. Cretin, Y. Q. Song, M. M. Smiljaniü , Ž. Laziü , K. Raduloviü
- Translation or Not:
- No
- Date of Publication:
- 2008-05-11