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Micromechanism of oxygen transport during initial stage oxidation in Si(100) surface: A ReaxFF molecular dynamics simulation study

  • Release Time:2025-04-30
  • Hits:
  • Date: 

    2025-04-30
  • Title of Paper: 

    Micromechanism of oxygen transport during initial stage oxidation in Si(100) surface: A ReaxFF molecular dynamics simulation study
  • Journal: 

    Applied Surface Science
  • Co-author: 

    Sun, Y. , Liu, Y. , Chen, X. , ... Xu, F. , Liu, Y.
  • Translation or Not: 

    No
  • Date of Publication: 

    2017-06-01