复杂三维微纳结构与器件的超短脉冲激光超精细加工及其应用
Release Time:2025-04-30
Hits:
- Project Name:
- 复杂三维微纳结构与器件的超短脉冲激光超精细加工及其应用
- Status:
- 进行中
- Classification of Project:
- Vertical project
- Project Source:
- other
- Project Number:
- 2012YQ12004706
- Date of Project Approval:
- 1988-10-01
- Date of Project Completion:
- 2015-05-01
- Date:
- 2025-04-30
- Prev One:飞秒激光湿法刻蚀微纳制造的基础研究
- Next One:复杂微细结构激光加工关键技术研究