Data-based switching feedforward control for repeating and varying tasks: With application to an ultraprecision wafer stage
Title of Paper:
Data-based switching feedforward control for repeating and varying tasks: With application to an ultraprecision wafer stage
Journal:
IEEE Transactions on Industrial Electronics
Co-author:
Min Li, Yu Zhu, Kaiming Yang, Laihao Yang, Chuxiong Hu
Papers
