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一种高介电常数复合氧化膜的制备方法

Release Time:2025-04-30
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Title:
一种高介电常数复合氧化膜的制备方法
Disigner of the Invention:
徐友龙,杜显锋,王杰,熊礼龙,孙孝飞
Type of Patent:
Invent
Application Number:
201410834473.1
Service Invention or Not:
No
Application Date:
2014-12-27
Date:
2025-04-30