一种低检测限MEMS乙炔气体传感器及制备方法
Release Time:2025-04-30
Hits:
- Title:
- 一种低检测限MEMS乙炔气体传感器及制备方法
- Disigner of the Invention:
- 王海容;曹慧通;张泽;胡宗鑫;贾琛;张群明
- Type of Patent:
- Invent
- Application Number:
- CN202310249660.2
- Service Invention or Not:
- No
- Application Date:
- 2023-03-15
- Date:
- 2025-04-30
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