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一种测量薄膜应变与热导率的装置及方

Release Time:2025-04-30
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Title:
一种测量薄膜应变与热导率的装置及方
Type of Patent:
Invent
Application Number:
201710118131.3
Service Invention or Not:
No
Application Date:
2017-03-01
Date:
2025-04-30