Numerical and experimental study on fabrication of microstructure array with topographical gradient via through-mask EMM
Title of Paper:
Numerical and experimental study on fabrication of microstructure array with topographical gradient via through-mask EMM
Journal:
2012 International Conference on Frontier of Nanoscience and Technology
Co-author:
Wang Quandai, Xiao Jiming, Lü Yanjun,Wang Li