中文
Home
Research
Research Field
Papers
Patents
Publications
Projects
Teaching
Teaching Resources
Teaching Information
Teaching Achievement
Awards and Honours
Enrollment Information
Student Information
My Album
Blog
Login
中文
Home
Research
Research Field
Papers
Patents
Publications
Projects
Teaching
Teaching Resources
Teaching Information
Teaching Achievement
Awards and Honours
Enrollment Information
Student Information
My Album
Blog
Personal Profile
To be updated...
Recommended Ph.D.Supervisor
Recommended MA Supervisor
王莉
副教授
Papers
Alignment measurement method for imprint lithography using moiré fringe pattern
Release Time:2025-04-30
Hits:
Date:
2025-04-30
Title of Paper:
Alignment measurement method for imprint lithography using moiré fringe pattern
Journal:
Optical Engineering
Co-author:
Jinyou Shao, Hon gzhong Liu, Yucheng Ding,Li Wang
Translation or Not:
No
Date of Publication:
2008-11-01
Prev One:
Strategy for a loading force induced overlay position shift in step imprint lithography
Papers
