西安交通大学教师主页管理系统王莉纳米压印光刻中多层套印精度控制机理与方法研究 Home

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纳米压印光刻中多层套印精度控制机理与方法研究

Release Time:2025-04-30 Hits:

Project Name:

纳米压印光刻中多层套印精度控制机理与方法研究

Status:

进行中

Classification of Project:

Vertical project

Project Source:

National Natural Science Foundation of China (NSFC)

Project Number:

50805117

Date of Project Approval:

2009-01-01

Date of Project Completion:

2011-12-01

Subsidy Amount(Wan Yuan):

21.0

Date:

2025-04-30