搜索
Development of a new optical acceleration sensor - art. no. 672418
发布时间：2025-04-30
点击次数：
- 发布时间：
- 2025-04-30
- 论文名称：
- Development of a new optical acceleration sensor - art. no. 672418
- 发表刊物：
- 3rd International Symposium on Advanced Optical Manufacturing and Testing Techno
- 摘要：
- A novel optical acceleration sensor based on optical fiber and MEMS technology is presented in this paper. It can effectively solve the problem of low immunity of inertial sensors and can be used in navigation system towards the Electro Magnetic Interference (EMI) and Electro Magnetic Pulse (EMP). A Fresnel diffractive micro lens is fabricated with a glass substrate. A reflecting membrane is placed behind the diffractive micro lens in parallel and its displacement is determined by acceleration. The sensing principle of the sensor is to calculate acceleration by measuring variousl light intensity at the frontal focal point of the diffractive micro lens. Moreover, the performance of sensor was analyzed. The results of analysis and computer simulation indicated that the design is logical and feasible. The results of proof-of-principle experiments indicate that the principle of this novel sensor is true and it has merits of simple structure and high sensitivity.
- 合写作者：
- Jia, Shuhai;Yang, Jia;Kong, Weijun;Du, Yanfen
- 是否译文：
- 否
- 发表时间：
- 2007-11-21
