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Correlation-coefficient based auto-focusing algorithm for focus detection in shape measurement using two-source digital holographic interferometry
发布时间：2025-04-30
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- 发布时间：
- 2025-04-30
- 论文名称：
- Correlation-coefficient based auto-focusing algorithm for focus detection in shape measurement using two-source digital holographic interferometry
- 发表刊物：
- Measurement Science and Technology（中科院 3区）
- 摘要：
- In this study, a simple auto-focusing algorithm to determine the focus plane in shape measurement using two-source digital holographic interferometry is presented. The wave fields corresponding to two illumination angles are reconstructed, and the correlation coefficient between two wave fields is calculated. This parameter is affected by the defocusing of the reconstruction image. Larger distances between the reconstruction plane and focus plane lead to smaller correlation coefficient. Because this relationship is independent of the strength of the feature patterns of a specimen, the focus plane can be automatically determined as the location of the maximum correlation coefficient without any artificial determination. Finally, the shape can be measured using two reconstructed wave fields of different illumination angle. Experiments have been conducted to demonstrate the feasibility of the proposed algorithm.
- 合写作者：
- Dong Jun；Jia Shuhai ;Jiang Chao
- 卷号：
- 29(8)
- 是否译文：
- 否
- 发表时间：
- 2018-07-12
