真空定向凝固提纯多晶硅过程中磷杂质的迁移特性研究
Release Time:2025-04-30
Hits:
- Project Name:
- 真空定向凝固提纯多晶硅过程中磷杂质的迁移特性研究
- Status:
- 进行中
- Classification of Project:
- Vertical project
- Project Source:
- China Postdoctoral Science Foundation
- Project Number:
- 2013M540747
- Date of Project Approval:
- 2013-09-01
- Date of Project Completion:
- 2016-03-01
- Date:
- 2025-04-30
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