Project Name:

高性能MEMS高温温度传感器关键技术研发及工程应用

Status:

进行中

Classification of Project:

Vertical project

Project Source:

National Key R&D Program Project

Project Number:

2020YFB2009100

Date of Project Approval:

2020-10-01

Date of Project Completion:

2023-09-01

Date:

2025-04-30