光刻物镜非球面镜超精面形检测技术基础研究
Release Time:2025-04-30
Hits:
- Project Name:
- 光刻物镜非球面镜超精面形检测技术基础研究
- Status:
- 进行中
- Classification of Project:
- Vertical project
- Project Source:
- National Natural Science Foundation of China (NSFC)
- Project Number:
- 51275395
- Date of Project Approval:
- 2013-01-01
- Date of Project Completion:
- 2016-12-01
- Subsidy Amount(Wan Yuan):
- 80.0
- Date:
- 2025-04-30
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