晶圆表面加工中几何参数的纳米精度在线测量方法与表征
Release Time:2025-04-30
Hits:
- Project Name:
- 晶圆表面加工中几何参数的纳米精度在线测量方法与表征
- Status:
- 进行中
- Classification of Project:
- Vertical project
- Project Source:
- 973 Project (Sub-project)
- Project Number:
- 2009CB724207
- Date of Project Approval:
- 2009-01-01
- Date of Project Completion:
- 2012-12-01
- Subsidy Amount(Wan Yuan):
- 360.0
- Date:
- 2025-04-30
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