Personal Homepage焦斌斌，男，教授，博士生导师，获得国家级人才计划。与企业合作研制出的三轴一体加速度MEMS芯片累计销售超10亿颗，相关工艺专利授权至TSMC；2015年在企业资助下将中科院微电子所先导中心的8英寸CMOS平台拓展成CMOS-MEMS工艺平台；所开发的智能MEMS传感器已批量应用于医疗与工业场景，实现了进口高端替代。
Name: 焦斌斌
Education Level: Successive postgraduate and doctoral programs of study
Degree: Doctor
Professional Title: Professor
Status: Employed
College: School Of Instrument Science And Technology
Discipline: Instrumentation Science and Technology