Personal HomepageAcademician of Chinese Academy of Engineering Consultant of Science and Technology Committee of the Ministry of Education Chairman of Shaanxi Association for Science and Technology Director of the State Key Laboratory for Manufacturing System Engineering Director of International Cooperation Joint Laboratory of Micro-nano Manufacturing and Testing Technology Director of Institute of Precision Engineering of Xi'an Jiaotong University
►国际首创原子层沉积技术结合湿法刻蚀的纳米台阶复合工艺，成功研制出目前国内尺度最小的5~40nm台阶高度标准物质，率先实现亚50nm台阶高度到国家基准的量值溯源；精确制备16~2000nm跨尺度系列纳米几何量计量标准物质，实现跨尺度栅格周期以及线宽到国家米定义波长基准的量值溯源；获批4项国家一级标准物质，10项国家二级标准物质，2021年获中国机械工业科学技术奖科技进步一等奖。
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纳米台阶高度 国家一级标准物质
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纳米栅格、线宽 国家二级标准物质 |
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