Optimized oxygen flux in sputtering amorphous Ga2O3 thin films enables high-performance solar-blind UV photodetectors
Release Time:2025-10-16
Hits:
- Date:
- 2025-10-16
- Title of Paper:
- Optimized oxygen flux in sputtering amorphous Ga2O3 thin films enables high-performance solar-blind UV photodetectors
- Journal:
- Vacuum
- Summary:
- 10.1016/j.vacuum.2025.114748
- Co-author:
- Zihan Zhang, Anzhen Zhang, Qiyi Wan, Rui Qin, Xinyue Zhang, Weiwei Cao, Jiuhong Wang*
- Volume:
- Volume 242
- Translation or Not:
- No
- Date of Publication:
- 2025-09-15