Argon Ion Beam Current Dependence of Si-Si Surface Activated Bonding
Release Time:2025-04-30
Hits:
- Date:
- 2025-04-30
- Title of Paper:
- Argon Ion Beam Current Dependence of Si-Si Surface Activated Bonding
- Journal:
- Materials
- Co-author:
- S Yang, NK Deng, YF Qu, K Wang, Y Yuan, WB Hu*, SL Wu, HX Wang
- Volume:
- 15(9)
- Page Number:
- 3115
- Translation or Not:
- No
- Date of Publication:
- 2022-05-20