Effects of surface activation time on Si-Si direct wafer bonding at room temperature
Release Time:2025-04-30
Hits:
- Date:
- 2025-04-30
- Title of Paper:
- Effects of surface activation time on Si-Si direct wafer bonding at room temperature
- Journal:
- Materials Research Express
- Co-author:
- S Yang, YF Qu, NK Deng, K Wang, S He, Y Yuan, WB Hu*, SL Wu, HX Wang
- Volume:
- 8（8）
- Page Number:
- 085901
- Translation or Not:
- No
- Date of Publication:
- 2021-08-21