微机电系统用无约束薄膜的力学性能研究
Release Time:2025-04-30
Hits:
- Project Name:
- 微机电系统用无约束薄膜的力学性能研究
- Status:
- 进行中
- Classification of Project:
- Vertical project
- Project Source:
- "863" High-tech Project
- Project Number:
- xjj20100080
- Date of Project Approval:
- 2010-01-01
- Date:
- 2025-04-30
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