微机电系统用一维薄膜无约束关键力学性能研究
Release Time:2025-04-30
Hits:
- Project Name:
- 微机电系统用一维薄膜无约束关键力学性能研究
- Status:
- 进行中
- Classification of Project:
- Vertical project
- Project Source:
- other
- Project Number:
- XA-AM-200711
- Date of Project Approval:
- 2007-01-01
- Date:
- 2025-04-30
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