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胡腾江
副研究员
Papers
The Research on MEMS S&A Device with Metal-Silicon Composite Structure
Release Time:2025-04-30 Hits:
Date:
2025-04-30
Title of Paper:
The Research on MEMS S&A Device with Metal-Silicon Composite Structure
Journal:
JMEMS
Co-author:
Tengjiang Hu , Kuang Fang, Zhiming Zhang
Translation or Not:
No
Date of Publication:
2020-02-18

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